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- High Purity: Ruthenium pellets are available in 99.95% (3N5) or higher purity, ensuring minimal contamination during thin-film deposition, critical for semiconductor and optical applications.
- Excellent Corrosion Resistance: Ruthenium’s resistance to corrosion and oxidation makes it highly durable, extending the lifespan of coatings in harsh environments.
- Stable Electrical Conductivity: Ruthenium maintains consistent conductivity even at high temperatures, making it ideal for electronic applications requiring stable performance.
- High Melting Point: With a melting point of 2334°C, Ru is suitable for use in high-temperature evaporation systems.
- Hard and Durable Films: Ruthenium thin films are known for their mechanical strength, scratch resistance, and ability to withstand environmental degradation.
- Uniform Deposition: Ru pellets are designed for consistent evaporation, providing uniform thin-film coatings in various deposition systems like thermal evaporation or electron beam evaporation.
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- High Chemical Stability: Ruthenium is resistant to most acids and does not corrode or tarnish easily, even in aggressive environments.
- Excellent Conductivity: With high electrical conductivity, ruthenium is widely used in electronic components like resistors and electrical contacts.
- Catalytic Activity: Ruthenium is an efficient catalyst in a range of chemical reactions, from hydrogenation to ammonia synthesis, and is particularly useful in fuel cells and renewable energy applications.
- Wear Resistance: Ruthenium coatings are exceptionally hard and wear-resistant, which increases the lifespan of coated surfaces in demanding applications.
- Improved Alloy Performance: When alloyed with other metals, ruthenium enhances hardness, corrosion resistance, and mechanical strength.
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Ruthenium (Ru) sputtering targets are used in physical vapor deposition (PVD) processes to create thin films and coatings on various substrates. Ruthenium, a platinum group metal, is valued for its excellent hardness, corrosion resistance, and high melting point, making it ideal for applications in electronics, data storage, and catalysis.
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- High Electrical Conductivity: SrRuO₃ films provide excellent electrical conductivity, making them ideal for use as electrodes and contact layers.
- Stability: Offers good stability under various operating conditions, making it suitable for use in demanding applications.
- Magnetic Properties: Exhibits magnetic properties, making it useful in devices that require the integration of magnetic and electronic functions.
- Compatible with Other Oxides: SrRuO₃ can be easily integrated with other perovskite oxide materials, making it versatile for various electronic applications.
- High Purity: Available in high-purity grades (≥99.9%) to ensure clean and consistent thin-film deposition.
