LaAlO3 (Lanthanum Aluminate) Sputtering Targets

  • High Dielectric Constant: LaAlO₃ has a high dielectric constant (k-value), which enhances its performance in capacitors and other high-k dielectric applications.
  • Thermal Stability: LaAlO₃ exhibits excellent thermal stability, making it ideal for high-temperature processing and devices that operate in extreme environments.
  • Structural Integrity: The perovskite structure of LaAlO₃ contributes to its high mechanical strength and chemical stability, ensuring long-lasting performance in demanding applications.
  • Oxide Electronics: LaAlO₃ is widely used in complex oxide electronics due to its ability to form high-quality interfaces with other materials like SrTiO₃ and LaNiO₃.

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Description

Material Lanthanum Aluminate (LaAlO₃)
Purity 99.9% – 99.9999% / 3N 3N5 4N 4N5 5N 5N5 6N
Shape disc, plate, sheet, rod, customized
Size can be customized (contact us)
Package vacuum bag or customer’s request
MOQ 1pcs
Supply Ability 10000pcs per month
Lead Time Qty: 1-100, Time: 3-10 days

Qty: >100, Time: to be negotiated

 

Lanthanum Aluminate (LaAlO₃) sputtering targets are a high-performance material used in various thin-film deposition applications. LaAlO₃ is a perovskite oxide with excellent dielectric properties and high thermal stability, making it ideal for producing high-quality films in electronics, optics, and advanced materials research. This material is commonly used for the fabrication of thin films in complex semiconductor and oxide electronics applications.

Key Applications

  • High-k Dielectric Materials: LaAlO₃ is used as a dielectric layer in advanced semiconductor devices, including memory capacitors, transistors, and gate dielectrics.
  • Thin Film Deposition: It is widely used for the deposition of thin films for microelectronics, optoelectronics, and spintronic applications.
  • Surface Passivation: LaAlO₃ thin films are employed for passivation layers in semiconductor devices to reduce surface recombination rates and improve device performance.
  • Oxide Electronics: LaAlO₃ plays a significant role in the development of oxide electronics, especially in applications involving high mobility oxides and complex oxide heterostructures.
  • Photovoltaics: Used in the fabrication of thin-film solar cells and other renewable energy technologies.
  • Catalysis and Sensors: LaAlO₃-based films are used in catalytic processes and gas sensors, particularly for their stability and high-temperature tolerance.

Features and Benefits

  • High Dielectric Constant: LaAlO₃ has a high dielectric constant (k-value), which enhances its performance in capacitors and other high-k dielectric applications.
  • Thermal Stability: LaAlO₃ exhibits excellent thermal stability, making it ideal for high-temperature processing and devices that operate in extreme environments.
  • Structural Integrity: The perovskite structure of LaAlO₃ contributes to its high mechanical strength and chemical stability, ensuring long-lasting performance in demanding applications.
  • Oxide Electronics: LaAlO₃ is widely used in complex oxide electronics due to its ability to form high-quality interfaces with other materials like SrTiO₃ and LaNiO₃.

Specifications

  • Composition: 99.9% pure lanthanum aluminate (LaAlO₃)
  • Size: Customizable diameters ranging from 50 mm to 200 mm or larger, depending on deposition system requirements.
  • Thickness: Typically available in thicknesses from 1 mm to 10 mm.
  • Density: Approximately 5.2 g/cm³.
  • Purity: High purity options available (99.99% and above) to ensure optimal performance in sensitive applications.

Customization Options

  • Size and Shape: Custom sizes and shapes tailored to the specific needs of deposition systems and applications.
  • Purity Levels: Available in various purity levels, including 99.99% and 99.999%, depending on the application.
  • Target Surface Treatment: Surface polishing and conditioning can be performed to improve the sputtering performance and film quality.

For custom LaAlO₃ sputtering targets, tailored sizes, and expert technical support, contact our team. We offer solutions to meet your specific requirements in electronic, optical, and advanced materials applications.