SrRuO3 (Strontium Ruthenate) Sputtering Targets
- High Electrical Conductivity: SrRuO₃ films provide excellent electrical conductivity, making them ideal for use as electrodes and contact layers.
- Stability: Offers good stability under various operating conditions, making it suitable for use in demanding applications.
- Magnetic Properties: Exhibits magnetic properties, making it useful in devices that require the integration of magnetic and electronic functions.
- Compatible with Other Oxides: SrRuO₃ can be easily integrated with other perovskite oxide materials, making it versatile for various electronic applications.
- High Purity: Available in high-purity grades (≥99.9%) to ensure clean and consistent thin-film deposition.
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Description
| Material | Strontium Ruthenate (SrRuO₃) |
| Purity | 99.9% – 99.9999% / 3N 3N5 4N 4N5 5N 5N5 6N |
| Shape | disc, plate, sheet, rod, customized |
| Size | can be customized (contact us) |
| Package | vacuum bag or customer’s request |
| MOQ | 1pcs |
| Supply Ability | 10000pcs per month |
| Lead Time | Qty: 1-100, Time: 3-10 days
Qty: >100, Time: to be negotiated |
Strontium ruthenate (SrRuO₃) sputtering targets are high-quality materials used to deposit thin films of SrRuO₃, a conductive oxide with exceptional electrical and magnetic properties. These targets are commonly utilized in applications where high conductivity and stability are required. SrRuO₃ films are known for their excellent performance in electronics, particularly in the fabrication of electrodes and contact layers in devices such as capacitors, transistors, and resistors.
Key Applications
- Electrodes and Contact Layers: SrRuO₃ is often used as a conductive electrode material in various electronic devices, including capacitors and superconducting films.
- Ferroelectric and Multiferroic Devices: Used in the deposition of thin films for ferroelectric and multiferroic applications due to its high conductivity and compatibility with perovskite oxide materials.
- Magnetic and Electronic Sensors: Employed in sensors and devices where both magnetic and electronic properties are necessary.
- Semiconductor Industry: Used in semiconductor fabrication, particularly for gate electrodes and as a contact material in thin-film transistors (TFTs).
- Supercapacitors: SrRuO₃ is used in energy storage devices, including supercapacitors, due to its excellent conductivity.
Features and Benefits
- High Electrical Conductivity: SrRuO₃ films provide excellent electrical conductivity, making them ideal for use as electrodes and contact layers.
- Stability: Offers good stability under various operating conditions, making it suitable for use in demanding applications.
- Magnetic Properties: Exhibits magnetic properties, making it useful in devices that require the integration of magnetic and electronic functions.
- Compatible with Other Oxides: SrRuO₃ can be easily integrated with other perovskite oxide materials, making it versatile for various electronic applications.
- High Purity: Available in high-purity grades (≥99.9%) to ensure clean and consistent thin-film deposition.
Specifications
- Purity: ≥99.9%
- Density: Approx. 6.45 g/cm³
- Shapes Available: Circular, rectangular, or custom shapes to fit specific sputtering systems.
- Sizes: Custom sizes available to meet the specific requirements of the deposition equipment.
- Surface Finish: High-quality surface finish for optimal film deposition.
Customization Options
- Shape and Size: Custom shapes and sizes available for specific sputtering system needs.
- Purity Options: Higher purity grades available for specialized applications.
- Backing Plate Materials: Available with various backing plate materials to support high thermal stability during the sputtering process.
For high-quality SrRuO₃ sputtering targets tailored to your thin-film deposition needs, contact us today. Our team is ready to assist with custom orders and provide solutions for your specific applications in electronics and energy storage.
